3D Full-Auto Video Measuring Machine for Semiconductor Manufacturing

3D MVA is a classical Fully Auto Vision Measuring Machine, it is equipped with four-axis motorized control and auto zoom lens and probe, powerful function, simple operation, widely application.
Four-axis CNC fully auto close loop control, auto measurement;"00" grade "JINANQING"marble base and pillar, stable and reliable;Precision linear guide, grinding ball screw and AC servo motor, ensure accuracy stability of system position;High precision linear scale, resolution is 0.5um, high accuracy, great stability;imported high definition color industry digital camera, ensure clear observation and stable measurement requirement;6.5X continue auto zoom lens, precision auto zoom, only need to make pixel calibration once time;Programmable 5-ring 8-division LED surface illumination, contour parallel LED illumination, can realize 256 grade brightness adjustment intelligently;With proprietary powerful function fully auto measuring software iMeasuring 4.2;Product Name3D Fully Auto Vision Measuring MachineModelMVA-3020PCode#524-360X/Y-axis Travel(mm)300x200Z-axis Travel(mm)200X/Y/Z 3-axis
Linear Scale(mm)High precision linear scale,resolution:0.0005mmGuidance ModePrecision linear guide,double-track double slider guideOperation ModeJoystick controller, Mouse operation, automatic detection programMeasurement AccuracyXY-axis:≤3+L/200Z-axis:≤5+L/200Repeatability±2umVideo SystemHigh definition 1/3" Color CCD Camera,6.5X continue click zoom lens; optical magnification: 0.7X-4.5X; video magnification:126X~172X(21.5"monitor)Field of View(mm)
(Diagonal * Horizontal*Vertical)Lens Magnification0.7x1x2.0x3.0x4x4.5x1/3"CCD8.57x6.86x5.146.00x4.80x3.603.00x2.40x1.802.00x1.60x1.201.50x1.20x0.901.33x1.07x0.80IlluminationContourLED Parallel Contour IlluminationSurface5-ring 8-division 0~255 grade continue adjustableSoftware SystemiMeasuring 4.2 Fully Auto Measuring SoftwareLoad Capacity(Kg)25Working EnvironmentTemperature 20ºC±2ºC,Humidity Range<2ºC/hr,Humidity 30~80%,Vibration<0.002g,<15HzPower220V/50Hz/10ADimension(mm)1200x780x1650Packing Dimension(mm)1360x1030x1900Weight(Kg)380* L is measuring length,unit is mm, the mechanical accuracy of Z-axis and focus accuracy is greatly related to the surface of the workpiece.
* * Magnification is approximate value, it is related to the dimension of monitor and resolution.
Customers can choose 0.5X or 2X optional objective, and realize image magnification: 13X~86X or 52X~344X.
Semiconductor Manufacturing: Wafers, front-ends, back-ends, and components
Precision metal Processing: Machining, Stamping, Powder metallurgy Injection Molding
Precision plastic