China 10L 13.56MHz Laboratory Silicon Wafer Plasma Cleaning System

CY 10L plasma cleaning system
Feature
1. Environmental technologies: plasma process is the role of gas - solid coherent reactor consumes no water resources, no need to add chemicals and no environmental pollution.
2. Wide adaptability: regardless of processing substrate type, such as metals, semiconductors, oxides, and most of the polymer material can be a good deal;
3. Low temperature: close to room temperature, particularly suitable polymer materials, have a longer retention time and a higher surface tension than the corona and flame method.
4. Multifunctions: it involves only a shallow surface of polymer materials (10 -1000A), while preserving the characteristics of the material itself can give it one or more new features;
5. Low cost: the device is simple, easy operation and maintenance, continuous operation,a few bottles of gas can replace thousands of kilograms cleaning fluid
6. The whole process technology can be controlled: all the parameters can be set by the computer and data recording
7. Treated geometry Unlimited: Big or small, simple or complex, parts or textiles can be processed.

Technical parameters

ModelCY-P10L-BWorking current:Total working current not higher than 2A (Not include the vacuum pump)ChamberHigh purity quartz tubeRF frequency13.56MHzRF power200-400WFrequency offset<0.4KHzVacuum degree60Pa-100PaCleaning time1-6000s adjustableGas flow>10-100mlProcess Controlmanually/automaticPower10-100%adjustableCleaning capacity10LExhaust pipeKF vacuum flange+vacuum aluminum pipeVacuum PumpBipolar direct rotary vane pumpImpedance matchingautomaticDisplayLCDPower supplyAC 220V 60Hz

Application
1.Car industry: ignition coil engine oil seal film
2.Defense industry: Aerospace electrical connectors,Kevlar deal
3.Electronics industry: hard plastic parts, earphone, Cell phone cover
4.Medical industry: intravenous infusion, catheter treatment
5.Textile fiber,rubber and plastic industry and etc

Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized
lab equipment.Welcome you come to visit us.