China 1200c Degc Dual Sliding Rtp Tube Furnace with Flanges for Tcvd

1200C degC Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD (thermal CVD)
Description of the dual sliding RTP tube furnace :

CY-OTF-1200X-S2-50SL is a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min. Optional motorized sliding, MFC gas delivery and RF Plasma generator are available to build a flexible TCVD system easily at low cost.
Specification of the dual sliding RTP tube furnace:

Furnace StructureBoth furnaces are double layer steel structure with 1200°C max. working temperatureEach Furnace has 200mm heating zone and 60 mm long constant temperature zoneOne pair of sliding rails are installed on bottom of furnace, which allows furnace to be manually moved from side to side with max sliding distance 400 mm.Vacuum flanges is installed for immediate use.Power of furnace2.5 KW in totalVoltage AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker requiredMax. Temperature 1200°C (<1 hour)Continuous Temperature 1100°C Heating & Cooling Rates

Heating Rate:

15°C/sec (RT - 150°C);

10°C/sec (150°C - 250°C);

7°C/sec (250°C - 350°C);

4°C/sec (350°C - 500°C);

3°C/sec (350°C - 550°C);

2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);

Cooling Rate:

15°C/sec (1000 - 950°C);

10°C/sec (950°C - 900°C);

7°C/sec (900°C - 850°C);

4°C/sec (850°C - 750°C);

2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);

Note:
The max heating and cooling rate is achieved by pre-heat one side of processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length 200mm( ~8") for each furnaceConstant Temperature Zone60 mm (+/-1°C @ 400-1200°C)Heating ElementsFe-Cr-Al Alloy doped by MoProcessing Tube Size High purity fused quartz tube

Size: 50mm O.D x 44mm I.D x1400 mm Length

Temperature ControllerTwo furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built-in over temperature alarm and protection allows for operation without an attendant.Two K-type thermal couples are included. Optional: The furnace may be operated by PC by installing control module. Please order an MTS-02 control module at extra cost. If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer (laptop) from us to avoid software installation problems.Temperature Accuracy +/ - 1°CVacuum Flanges

Stainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy duty support. Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost.

Sliding Rails / TableDouble sliding rail made by Cr-plated steelSliding length: 1200 mmTwo slide stopping clamps are included for holding the position of the furnaces.Vacuum Level Limited by pump ( pump is not included, contact us to order )10E-5 torr can be achieved via molecular pump10E-2 torr can be achieved via a mechanical pump.Optional for upgrateMotorized sliding is available upon request1-9 chaanel gas mixing and delivery moudles is availle 100W - 500W RF plasma generator for plasma enhanced processing is available upon request. This module allows you build your own Plasma Enhanced Thermal CVD systemDimensionsFurnace: 340 x 300 x 400 mmTotal:1600 x 430 x 500 mm ( furnaces + sliding )Net Weight ~ 80 Kg
Shipping Package Size70" x 45" x 45" (inch)
Shipping Weight 300 lbsWarrantyOne year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).ComplianceCE Certified

reference picture of the sliding RTP tube furnace:
other related tube furnace that we have:

Company information:
Zhengzhou CY Scientific Instrument Co., Ltd.-founded in 2013 is a high and new technology enterprise registered in Zhengzhou,Henan province. We mainly supply the lab instruments for material research in labs like the cutting machine, milling machine, polishing machine, sintering furnace, mixing machine, glove box, film coating machine, etc.
Contact information:
contact phone: 0086 371 55365392