China Compact Slidable Pecvd Tube Furnace Syetm with Rtp Tube Furnace

Compact Slidable PECVD Tube Furnace syetm with RTP tube furnace
CY-O1200-50IC-MRTP-X is an affordable and compact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system with slidable mechanism. It consists of a 300W RF plasma generator, a 2"O.D split tube furnace and the integrated slidable rail which allows you preheat and slide the furnace to the sample zone in order to get your sample an instant exposure under high temperature. This system can be updated to advanced model with optionals. It is ideal tool for the researcher to make innovation under limited budget.
Features of the PECVD furnace system:
· Lower temperature processing compared to conventional CVD.
· High heating & cooling rate using sliding furnace
· Film stress can be controlled by high/low frequency mixing techniques.
· Control over stoichiometry via process conditions.
Specifications of the sliding PECVD tube furnace system:

Slidable Split Tube furnace· Input power: 208 - 240V AC, 1.2kW
· 1200°C Max. working temperature for < 60 minutes
· 1100°C Max for continuous heating
· High purity quartz tube 2"OD x 1.7"ID x 39.4" Length
· 30 segments programmable precision digital temperature controller
· 8" (200mm), single zone. 2.3" (60mm) (+/-1°C) @ 1000°C The following picture shows the temp. distribution across the heating zone, please click to enlarge.Plasma RF Generator· Output Power: 5 -300W adjustable with ± 1% stability
· RF frequency: 13.56 MHz ±0.005% stability
· Reflection Power: 200W max.
· Matching: Automatic
· RF Output Port: 50 Ω, N-type, female
· Noise: <50 dB.
· Cooling: Air cooling. (water cooling is available upon request, and a water chiller can be ordered seperately)
· Power : 208-240VAC, 50/60HzVacuum Flange and Fittings· Vacuum flange set is made of stainless steel 304.
· Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamp,a KF-25 right angle valve, a KF-25 vacuum bellows, a flange support 1/4 O.D hose fitting, and a needle valve.
· Right flange assembly includes a digital pirani gauge, 1/4 O.D tube fitting, 1/4" feedthrough and a needle valve.Vacuum Pump· AC 220V 50 Hz 1/2HP 375W
· 2 Liter /S or 120 liter/m
· Oil trap (inlet) and exhaust filter (outlet) are installed.
· Max. vacuum: 10-2 torr
Product Dimensions· Overall Dimensions: 1500mm x 600mm x 1200mm (all system, L x W x H)
· Net weight: 350 lbs
· Shipping weight: 480 lbsOptionals· Please choose below gas delivery systems based on your buddget ( click underlined or picture to order )
o Low cost Compact Anti-Corrosion Three Channel Gas Mixer
o Compact Liquid Vaporization Systems
o Three Channels MFC Gas Control System
o Constant temperature control moduleWarranty· One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.)Compliance· CE Certified
· Temperature controller is MET and CE CertifiedWarning· The tube furnaces with quartz tube are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure)
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