China Dual Sliding Tube Furnace with Tube Flanges for Tcvd

1200°C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD - OTF-1200X-S2-50SL
Introduction
OTF-1200X-S2-50SL is a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min. Optional motorized sliding, MFC gas delivery and RF Plasma generator are available to build a flexible TCVD system easily at low cost.
Specification

Furnace StructureBoth furnaces are double layer steel structure with 1200°C max. working temperature
Each Furnace has 200mm heating zone and 60 mm long constant temperature zone
One pair of sliding rails are installed on bottom of furnace, which allows furnace to be manually moved from side to side with max sliding distance 400 mm.
Vacuum flanges is installed for immediate use.Power of furnace 2.5 KW in totalVoltage AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker requiredMax. Temperature1200°C (<1 hour)Continuous Temperature1100°CHeating Zone Length200mm( ~8") for each furnaceConstant Temperature Zone60 mm (+/-1°C @ 400-1200°C)Heating ElementsFe-Cr-Al Alloy doped by MoProcessing Tube SizeHigh purity fused quartz tube
Size: 50mm O.D x 44mm I.D x1400 mm Length Temperature ControllerTwo furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
Built-in over temperature alarm and protection allows for operation without an attendant.
Two K-type thermal couples are included. Temperature Accuracy+/ - 1°C Vacuum FlangesStainless steel vacuum flanges with a vacuum gauge are installed on both ends of the tube with heavy duty support.
Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost. Sliding Rails / TableDouble sliding rail made by Cr-plated steel
Sliding length: 1200 mm
Two slide stopping clamps are included for holding the position of the furnaces. Vacuum Level Limited by pump
10E-5 torr can be achieved via molecular pump
10E-2 torr can be achieved via a mechanical pump.Optional for upgradeMotorized sliding is available upon request
1-9 channel gas mixing and delivery moudless is available
100W - 500W RF plasma generator for plasma enhanced processing is available upon request DimensionsFurnace: 340 x 300 x 400 mm
Total:1600 x 430 x 500 mm ( furnaces + sliding ) Net Weight~ 80 KgShipping Package Size70" x 45" x 45" (inch)Shipping Weight300 lbsWarrantyOne year limited manufacturer's warranty

Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us.