China High Vacuum Magnetron Spatter Coating System Machine

Hot selling vacuum magnetron sputtering system machine

Science and technology research rubber burr removal machine vacuum magnetron sputtering with film system
Features:
It is characterized by high automation, high pumping speed, and new patented turntable.
High capacity, single cavity operation to reduce and reduce maintenance time and cost, three sputteringTarget at the same time, shorten the production time.
System specification of Vacuum coating machine
Vacuum coating machine
Power specifications
220V 3 PHASE ,60A x 1 set,30A x 2 set
Power specifications
System with turntable
High vacuum pump
High vacuum refrigeration pump 10 inch (CTI Torr 10)
Crude vacuum pump
Mechanical pump, pumping rate :1000L/min
Vacuum studio
Stainless steel, circulating cooling water pipe
Sputtering target
5x22 inch Magnetic field plane cathode x3
Vacuum measurement
Low vacuum gauge TC gauge 1.0E3-1.0E-3 Torr
High vacuum gauge Ion gauge 1.0E-3-1.0E-6 Torr
Sputtering power
6kw DC power supply x3
Process control
Fully automatic / manual control unit for touch screen operation
Process gas
Argon 0-200sccm
Working pressure
1.5E-1-1.0E-5 Torr
System sturcture drawing
Machine speed of Vacuum coating machine
coarse vacuum
high vacuum
Sputtering time
3~5 Min
10~15 Min
10 Min
Time / furnace
8hours/furnace
8H/furnace
30 Min
16 batch
16 batch
Capacity table (Medium substrate 0603)
frame /furnace
furnace /(8H)
Bar / frame
Grain / strip
256
16
142
70
8hours/day
day/month
frame rate
The total output of the subtotal
3
30
85%
30 Billion Billion
Application of Vacuum coating machine


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