RF generator used in PECVD system
Introduction
13.56MHz RF generator upto 500W for DIY of PECVD (Plasma Enhanced Chemical
Vapor Deposition) for Plasma etching, Plasma cleaning, plasma polymerization etc.
SPECIFICATIONS
Noise<50 dBOutput Power5 -500W adjustable with ± 1% stability ( the power can be designed as your requirement)RF frequency13.56 MHz ±0.005% stabilityReflection Power200W max.MatchingAutomaticRF Output Port50 Ω, N-type, femaleCoolingAir coolingPower208-240VAC, 50/60HzTube Size50 - 130 mm ( 2''- 5'' OD) ( larger diameter coil up to 11" diameter is available upon request )ApplicationCombine with tube furnace to get PECVD systemother detailscan be desigbed as your requirement
Factory
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us.
Exhibition