China Sapphire Lapping Wafer Polishing Plate Turn Table

High Purity Alumina Ceramics Disc as Sapphire Lapping Wafer Polishing Plate Turn Table
Description:
Chemshun Ceramics' alumina ceramics sapphire lapping wafer polishing is shaped as PIBM producing process. Its an internaltional advanced technology. PIBM sucessful solve the key problem of crack and deformation of large size alumina ceramics.PIBM technology will open another window of fine ceramics. We not only produce the high quality alumina ceramic wafer polishing plate, but also other series of large size high purity alumina ceramics such as 1200x500x20mm ceramic substrates for LCD manufacturing equipment, semiconductor delviery tracks, vacuum parts, general mechanical parts, bulletproof ceramics.
Application:
Pingxiang Chemshun Ceramics' High Purity 99.7% Alumina Ceramic Sapphire Lapping wafer Polishing Turn Table as an important component of CMP chemical mechanical polishing process. CMP is the necessary for producing process of the sapphire and Wafer. Because of the high purity alumina ceramics polishing plate excellent working performance, it is replacing the metal wafer polishing plate.
Features :
High rigidity (Hardness, Mechanical Strength, Wear Resistance)
High chemical durability
Surface shape & roughness control
Pretty Price
Size:
Disc, ring size below ∅850mm, thickness 45mm.
For example: D150mm, D360mm, D450MM D600mm.
Customized products with various size are accepted.
Main Parameter : (Chemical / physical):

UnitChemshun 99.7 Alumina CeramicsGeneral PropertiesAl2O3 contentwt%99.7-99.9Densitygm/cc3.94-3.97Color-IvoryWater absorption%0Mechanical PropertiesFlexural Strength(MOR) 20 ºCMpa(psix10^3)440-550Elastic Modulus 20ºCGPa (psix10^6)375Vickers HardnessGpa(kg/mm2) R45N>=17Bending StrengthGpa390Tensile Strength 25ºCMPa(psix10^3)248Fracture Toughness (K I c)Mpa* m^1/24-5Thermal ProperitiesThermal conductivity(20ºC)W/mk30Coefficient of Thermal expansion(25-1000ºC)1x 10^-6/ºC7.6Thermal Shock ResistanceºC200Maximum use temperatureºC1700Electrical ProperitiesDielectric Strength (1MHz)ac-kv/mm(ac v/mil)8.7Dielectric Constant(1 MHz)25ºC9.7Volume Resistivityohm-cm (25ºC)>10^14ohm-cm (500ºC)2x10^12ohm-cm (1000ºC)2x10^7
Chemshun Ceramics High Purity 99.7% Alumina Ceramic Sapphire Polishing Turn Table widely used in the semiconductors manufacturing equipment. For more information, welcome to direclty contact with us.