China Top Selling Purity 99.9% Boron Trichloride

BCl3(Boron Trichloride) is the main gas composition in High-K and metal anisotropic plasma etch. Atomic layer etch and pulsed plasma etch. BCl3 is mainly used for fine etching of aluminum circuits in the manuf-acturing process of LCD panels.
Product Specifications:

ProductSpecification(ppm)Analytical Results (ppm)BCl3 ≥ 99.999%>99.999%Impurities O2≤ 1.50.1022N2≤ 1.50.2239CO ≤ 1.20.9172CO2≤ 2.00.5003CH4≤ 0.50.2209metal impuritiesSpecification(ppb)Analytical Results(ppb)Al≤ 101.18Ca≤ 105.30Cr≤ 102.70Cu≤ 102.71K≤ 100.21Mg≤ 101.35Mn≤ 102.69Na≤ 104.64Ni≤ 102.51Si≤ 106.24Zn≤ 101.16Fe≤ 6023.71

Package Type:
Company Information:
Suzhou Xunhe Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.