Electron Grade Trichlorosilane

Trichlorosilane is a silicon precursor for epitaxial silicon-containing thin films, especially for the
preparation of starting wafers.Specifications:
Purity %:≥99.85Resistivity:≥ 300 ohm-cmBoron:≤ 0.1 ppba siliconTotal Carbon:≤ 5ppmaIron:≤ 5ppbaOther Chlorosilane :≤ 500 ppmCylinder State @21.1°C :LiquidFlammable Limits In Air :7-83%Auto Ignition Temperature (°C ):182Molecular Weight (g/mol):135.45Specific gravity (air =1):4.67Critical Temperature (°C ):242.5
Package type:
Company Information:Suzhou Xunhe Chemical Co., Ltd is staffed by trained personnel, combine many years experience in Gas industry .We supply cylinder gas, electronic gas, etc ., and the gas holder, panel, valves and fittings and other equipment, parts and engineering services to our customers in China and worldwide; The products are involved in various industrial fields, such as semiconductor chip, solar cell, LED, TFT-LCD, optical fiber, glass, laser, medicine , etc., Our mission is to partner with our global customers to provide support, solutions and quality products that are innovative,reliable, and safe.
Our products mainly include: H2, O2, N2, Ar, CO2, propane, acetylene, helium, laser mixed gas, SiH4, Sih2cl2, SiHCL3, SiCL4, NH3, CF4, NF3, SF6, HCL, N2O, doping mixed gas (TMB, PH3, B2H6) and other electronic gases.