Pecvd Tube Furnace System with 500W RF Generator

PECVD tube furnace system for deposition graphene ,SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) depositionDescription of the PECVD tube furnace system:
CY-O1200-60-4CLV-PE (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 500W RF plasma source, 2" or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state.Outstanding features of the pecvd tube furnace
1. Lower temperature processing compared to conventional CVD.
2. Film stress can be controlled by high/low frequency mixing techniques.
3. Control over stoichiometry via process conditions.
4. Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy andAmorphous silicon (a-Si:H) deposition.Specification of the PECVD tube furnace system:
SplitTube furnaceInput power: 208 - 240V AC, 1.2kW
1200°C Max. working temperature for < 60 minutes
1100°C Max for continuous heating
High purity quartz tube 2"OD x 1.7"ID x 39.4" Length
30 segments programmable precision digital temperature controller
8" (200mm), single zone. 2.3" (60mm) (+/-1°C) @ 1000°C Optional 1: touch screen tube furnace
Optional 2: tube furnace with LED display controller
Plasma RF GeneratorOutput Power:5 -500W adjustable with ± 1% stability
RF frequency: 13.56 MHz ±0.005% stability Reflection Power: 200W max.
Matching: Automatic
RF Output Port: 50 Ω, N-type, female
Noise: <50 dB.
Cooling: Air cooling.
Power : 208-240VAC, 50/60HzVacuum Flange and FittingsVacuum flange set is made of stainless steel 304.
Left flange assembly includes a KF-25 vacuum port, two KF-25 quick clamp,
A KF-25 right angle valve, a KF-25 vacuum bellows, a flange Support 1/4 O.D Hose fitting, and a needle valve.
Right flange assembly includes a digital pirani gauge, 1/4 O.D tube fitting, 1/4"Feedthrough and a needle valve.Vacuum Pump AC 220V 50 Hz 1/2HP 375W
2 Liter /S or 120 liter/m
Oil trap (inlet) and exhaust filter (outlet) are installed.
Max. vacuum: 10-2 torrFor high vacuum degree upto 10-4 Pa, please order our molecular pump system with extra cost.Warranty 12 month (exclusive wearing part)
reference picture of the PECVD system:

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our company information:
Zhengzhou CY Scientific Instrument Co., Ltd.-founded in 2013 by a group of professional engineers from KJ group.CY is a high and new technology enterprise registered in Zhengzhou,Henan province. CY Scientific Instrument mainly provide regular furnace for lab. Also do customized furnace and some other related accessories and equpments in high quality and low cost precision machines for material research and R&D lab. Ourmainlyproducts include high temperature furnace,include 1200/1400/1700 degree muffle furnace,1200/1400/1700 degree tube furnace, dental furnace, vacuum furnace,gold melting furnace, SiC heating element, MoSi2 heating element, alumina tubes and crucibles, and etc.