Lab Ion Sputtering Coater, Sem Ion Sputtering Coater, Ion Sputtering Coater Manufacturer manufacturer / supplier in China, offering Mini Size Ion Sputter Coater for Sem Sample Preparation, Multi-Layer Boards CNC Single Spindle Guide Hole Puncher with CCD Image System, Single Spindle CCD Camera Target Hole Drilling Punching Machine for Fr4 Glass Fiber Boards and so on.
Min. Order / Reference FOB Price | |
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1 Piece | US $75000.00/ Piece |
Local Area: | Guangzhou, Guangdong, China |
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R&D Capacity: | OEM, ODM, Other |
Payment Terms: | LC, T/T, PayPal, WesternUnion |
Usage: | Semiconductor |
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Type: | Plate Exposure |
Page: | Single Face |
The MD-BG-407 Automatic mask aligner produced by the 45th research institute could fully satisfy the manufacture on LED chip, diode, triode and other device. It could realize automatic carrying, aligning, exposure of substrate and be provided with high automatization and efficiency.
Main Feature:
Alignment worktable
The alignment worktable is made up of X,Y,θ and Z direction precise electromotion mechanism. It realizes gap leveling and exposure, vacuum printing in contact mode and has the device of preventing falling off of mask.
Exposure system
Composing feedback loop by photosensor of inspecting light intensity in exposure system and mercury lamp power supply to insure constant light power in the course of working.
Aligning microscope
Aligning microscope is split view field microscope provided with image display by CCD and motor-driven focusing. It is switched between front and back by moving the whole body to locate exposure position.
Prealignment system
Prealignment system carries non-contact measurement by using photoelectric sensor and realizes the precision adjustment of scrap edge and the center of the substrate. It improves the efficiency of automatic aligning system and the whole equipment by making the substrate at prealignment accuracy.
Substrate transfers system
The planar movement configuration of the substrate transfers system has three planar shovels divided into two teams to realize substrate's horizontal parallel transfer in straight and it improves the efficiency of equipment.
Up-and-down system of cassette system
Up-and-down system of cassette is driven by individual motor. The existence of cassette and substrate is tested by sensors, which improves the reliability of substrate transfer.
Control system
The whole equipment is controlled by the industry PC. It's manipulated by touch screen and key-press and provided with the functions of marker searching out of field view, automatic aligning, technics document management, running record management etc.
Main Specification:
Alignment travel
X-axis: ±5mm Y-axis:±5mm
Z X-axis:25mm θY-axis:±15°
Size of mask: 5″x5″
Size of wafer: φ2″,φ3″,φ4″
Exposure mode: hard , vacuum
contact and proximity exposure
Microscopes
Total magnification: 90X
Separation between objective :35~100mm
Automatic aligning precision :±1um
Exposure Resolution:
1μm(positive photoresist, vacuum print);
4μm(20um proximity exposure)
Non-uniformity of Exposure
±2% (Max Exposure area: φ108mm)
Collimation:±2°
Efficiency: 120 pieces/h(contact leveling,first exposure,exposure time:3s)
Facilities:
Voltage: ~220v±22v(50Hz)
Power consumption: 1KW
Light: Red or yellow
Air pressure: 0.5~0.7MPa
N2 pressure: 0.2~0.4MPa
Vacuum: -0.08~-0.14MPa
Dimensions&Weight:
Overall Dimensions:1400mmx1300mmx2300mm
weight: 1000kg
Comprason table:
Model:
Mask Size
Wafer Size
Exposure
Type
Manual /Automatic
Application has been in
MD-BG-401A
5inch
4inch
Single side
manual
Small or middle IC,SAW,other
MD-SB-402
5inch
4inch
Dual side
manual
Photoelectric/power device,sensors,hybrid circuits,MEMS etc.
MD-BG-403D
5inch
4inch
Dual side
manual
GPP diode,power device,others.
MD-BG-403S
5inch
4inch
Single side
manual
MD-BG-406
7inch
6inch
Single/double
manual
IC.GPP,LED,MEMS,others
MD-BG-407
5inch
2/3/4
inch
Single side
automatic
LED,Diode,triode,etc.
MD-BG-601A
7inch
6inch
Single/double
manual
Power,sensor,photoelectron devise,etc.
MD-BG-602B/C BX
7inch
6inch
Single/double
manual
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Guangzhou minder-hightech co., ltd www.minder-hightech.com
No.1 Xingya 3 Road, panyu district, guangzhou, China
cell phone 0086-15813334038