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China Dual Side Exposure Mask Aligner MD-Sb-402

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Min. Order / Reference FOB Price
1 Piece	US $75000.00/ Piece

Local Area:	Guangzhou, Guangdong, China
R&D Capacity:	OEM, ODM, Other
Payment Terms:	LC, T/T, PayPal, WesternUnion

Usage:	Semiconductor
Type:	Plate Exposure
Page:	Single Face

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Product Description

Manual Mask Aligner MD-SB-402

MD-SB-402 Mask Aligner is mainly designed for double aligning and exposure process of photoelectric device, power device, sensors, hybrid circuits, micro wave device and MEMS etc.

Main Features:

Alignment:Double layer thin three-dimensional alignment stage with high precision by V-linear guideway and θ-direction thin bearing, center slippery piece, high linearity and rotating precision.

Mechanical arm: Linear guideway and Ball screw, high positioning precision and repeatability.

Top mask system: THK adjusted separation linear guideway is adopted for the up-down guideway of top mask, the digital micrometer with high resolution is used for driver, high positioning precision and repeatability.

Align view system: Clear obtained by horizontal split field microscope with symmetrical double light route

Electric control system: Convenient operation and steady performance achieved by PLC and Touchscreen control, running status display and much testing function

Exposure system: Top and bottom unattached exposure system with advanced structure, providing high light intensity, uniformity and optical resolution

Main Specifications:
Alignment stage parameters:
X-axis: ±4mm
Y-axis: ±4mm
θ-direction: ±5°
Size of wafer : φ4″
Size of mask : 5″x5″
Precision of double-sides aligning: ±0.003mm
Mechanical arm system parameters:
Gap of mechanical arm from lower mask:
0~100μm(Min increment:1μm)
Exposure system parameters:
Illumination: 250W high pressure mercury vapor lamp
Wavelength: UV365
Max exposure area: φ110mm
Non-uniformity:±3%
Printing resolution: 3μm (plus photoresist)
Cooling of mercury vapor lamp: wind
Exposure time: 0~999s(Min increment:1s)
Split view field microscope parameters:
Magnification: 65X
View field: φ3.3mm
Separation between objectives: 26~70mm
Facilities:
Voltage: ~220V±22V(50HZ)
Power consumption: 1.5KW
Light: Red or yellow
N2 pressure:0.2~0.4MPa
Air pressure: 0.5~0.7MPa
Vacuum: -0.08~-0.1mPa
Dimensions & Weight:
Weight: 480KG
Overall Dimensions: 950mmx850mmx1500mm