Lab Ion Sputtering Coater, Sem Ion Sputtering Coater, Ion Sputtering Coater Manufacturer manufacturer / supplier in China, offering Mini Size Ion Sputter Coater for Sem Sample Preparation, Multi-Layer Boards CNC Single Spindle Guide Hole Puncher with CCD Image System, Single Spindle CCD Camera Target Hole Drilling Punching Machine for Fr4 Glass Fiber Boards and so on.
Min. Order / Reference FOB Price | |
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1 Piece | US $75000.00/ Piece |
Local Area: | Guangzhou, Guangdong, China |
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R&D Capacity: | OEM, ODM, Other |
Payment Terms: | LC, T/T, PayPal, WesternUnion |
Usage: | Semiconductor |
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Type: | Plate Exposure |
Page: | Single Face |
--High uniformity fly-eye exposure head / air flotation leveling mechanism / reliable vacuum clamping exposure.
--Above feature make sure the high resolution and high uniformity.
--Aligning method by mask keep stable and substrate feeding, which make sure the consistency of the guide gravity and the force.
--Using gapless straight guide, high precision, fast speed.
Specification:
1, Power:220v 50Hz,Air source:>=0.4Mpa,Vacuum:-0.07~0.08Mpa
2,Dimension:720*720*882mm,wight:100kg
3,Exposure range:<=D117mm. one-side exposure.
4,Non uniformity: +-3% in D100mm
5,Time set:0.1-999.9 seconds
6,Contact exposure, with 3 kinds of exposure: hard contact exposure, soft contact exposure, light force contact exposure.
7,Resolution requirement: better than 1um.
8,With 3 kinds of chuck, can vacuum chuck rectangular mask which is 5''*5" or 4"*4" or 3"*3". no limit for the thickness(1-6mm is ok.).
9,With 3 pcs of vacuum suck holder for substrate, for 4",3",2" substrate,optional customize 5" ,6" substrate.
10,Alignment:with 2 microscope and also 2 CCD is assembly to the microscopes, can see from the screen.
a,microscope 0.7X-4.5X continuously doubling.
b,observation system is 0.7*57=40X(min),4.5*57=256X(max),or (91x~570x).
c,align table:X,Y:+-5mm, angle<=+-5degree.
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Guangzhou minder-hightech co., ltd www.minder-hightech.com
No.1 Xingya 3 Road, panyu district, guangzhou, China
Shunyu Hu0086-15813334038
Cell phone:0086-15813334038